Three-point bending analysis of doubly clamped silicon nanowire beams; Young's modulus, initial stress, and crystal orientation

标题
Three-point bending analysis of doubly clamped silicon nanowire beams; Young's modulus, initial stress, and crystal orientation
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 117, Issue 16, Pages 164311
出版商
AIP Publishing
发表日期
2015-05-01
DOI
10.1063/1.4919017

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