Young’s Modulus, Residual Stress, and Crystal Orientation of Doubly Clamped Silicon Nanowire Beams

标题
Young’s Modulus, Residual Stress, and Crystal Orientation of Doubly Clamped Silicon Nanowire Beams
作者
关键词
-
出版物
NANO LETTERS
Volume 15, Issue 5, Pages 2945-2950
出版商
American Chemical Society (ACS)
发表日期
2015-04-01
DOI
10.1021/nl5047939

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