Focused helium-ion-beam-induced deposition

High-resolution direct-write patterning using focused ion beams

(2014) Leonidas E. Ocola et al.   MRS BULLETIN

Split-ball resonator as a three-dimensional analogue of planar split-rings

(2014) Arseniy I. Kuznetsov et al.   Nature Communications

Fabrication of carbon nanomembranes by helium ion beam lithography

(2014) Xianghui Zhang et al.   Beilstein Journal of Nanotechnology

Novel nanosample preparation with a helium ion microscope

(2013) Maria Rudneva et al.   JOURNAL OF MATERIALS RESEARCH

Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing

(2013) H. Wu et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

A comparison of neon versus helium ion beam induced deposition via Monte Carlo simulations

(2013) Rajendra Timilsina et al.   NANOTECHNOLOGY

Synthesis of nanowires via helium and neon focused ion beam induced deposition with the gas field ion microscope

(2013) H M Wu et al.   NANOTECHNOLOGY

Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

(2012) Paul F. A. Alkemade et al.   SCANNING

Nano-structuring, surface and bulk modification with a focused helium ion beam

(2012) Daniel Fox et al.   Beilstein Journal of Nanotechnology

Fundamental Proximity Effects in Focused Electron Beam Induced Deposition

(2011) Harald Plank et al.   ACS Nano

Neon Ion Beam Lithography (NIBL)

(2011) Donald Winston et al.   NANO LETTERS

Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection

(2011) Jijin Yang et al.   NANOTECHNOLOGY

The history and development of the helium ion microscope

(2011) Nicholas P. Economou et al.   SCANNING

Scanning helium ion microscope: Distribution of secondary electrons and ion channeling

(2010) Yu. V. Petrov et al.   Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques

Identification at high mass resolution of the positive ion at m/z 19 produced by electron-stimulated desorption: F+ (rather than H3O+)

(2010) Peter Williams et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Focused helium ion beam milling and deposition

(2010) S.A. Boden et al.   MICROELECTRONIC ENGINEERING

Monte Carlo simulation of focused helium ion beam induced deposition

(2010) Daryl A Smith et al.   NANOTECHNOLOGY

Nanopillar growth by focused helium ion-beam-induced deposition

(2010) Ping Chen et al.   NANOTECHNOLOGY

Advances in helium ion microscopy

(2010) R. Hill et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV): Total cross section as a function of incident electron energy

(2009) W. F. van Dorp et al.   JOURNAL OF APPLIED PHYSICS

Origin of the Difference in the Resistivity of As-Grown Focused-Ion- and Focused-Electron-Beam-Induced Pt Nanodeposits

(2009) J. M. De Teresa et al.   Journal of Nanomaterials

Beam induced deposition of platinum using a helium ion microscope

(2009) Colin A. Sanford et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Roles of secondary electrons and sputtered atoms in ion-beam-induced deposition

(2009) Ping Chen et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Sub-10-nm nanolithography with a scanning helium beam

(2009) Vadim Sidorkin et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist

(2009) D. Winston et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

(2009) Richard Livengood et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Precision cutting and patterning of graphene with helium ions

(2009) D C Bell et al.   NANOTECHNOLOGY

A model of secondary electron imaging in the helium ion scanning microscope

(2009) Ranjan Ramachandra et al.   ULTRAMICROSCOPY

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

The influence of beam defocus on volume growth rates for electron beam induced platinum deposition

(2008) H Plank et al.   NANOTECHNOLOGY

Fast single-step fabrication of nanopores

(2008) P Chen et al.   NANOTECHNOLOGY