Roles of secondary electrons and sputtered atoms in ion-beam-induced deposition

标题
Roles of secondary electrons and sputtered atoms in ion-beam-induced deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 2718
出版商
American Vacuum Society
发表日期
2009-12-15
DOI
10.1116/1.3237147

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