Gas-assisted focused electron beam and ion beam processing and fabrication

标题
Gas-assisted focused electron beam and ion beam processing and fabrication
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 4, Pages 1197
出版商
American Vacuum Society
发表日期
2008-08-22
DOI
10.1116/1.2955728

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