AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

标题
AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth
作者
关键词
-
出版物
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
Volume 64, Issue 2, Pages 20302
出版商
EDP Sciences
发表日期
2013-10-04
DOI
10.1051/epjap/2013130445

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