Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited onc-Plane Sapphire

标题
Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited onc-Plane Sapphire
作者
关键词
-
出版物
Journal of Nanomaterials
Volume 2012, Issue -, Pages 1-6
出版商
Hindawi Limited
发表日期
2012-03-19
DOI
10.1155/2012/914184

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