Review of molecular dynamics/experimental study of diamond-silicon behavior in nanoscale machining

标题
Review of molecular dynamics/experimental study of diamond-silicon behavior in nanoscale machining
作者
关键词
Molecular dynamics, Potential function, Optical silicon, Diamond tool geometry and wear, Plastic deformation, Anisotropy
出版商
Springer Nature
发表日期
2018-06-10
DOI
10.1007/s00170-018-2041-7

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