A numerical study of residual stress induced in machined silicon surfaces by molecular dynamics simulation

标题
A numerical study of residual stress induced in machined silicon surfaces by molecular dynamics simulation
作者
关键词
Residual Stress, Molecular Dynamic Simulation, Machine Surface, Compressive Residual Stress, Thrust Force
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 115, Issue 4, Pages 1263-1279
出版商
Springer Nature
发表日期
2013-10-23
DOI
10.1007/s00339-013-7977-8

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