Dislocation-mediated plasticity in silicon during nanometric cutting: A molecular dynamics simulation study

标题
Dislocation-mediated plasticity in silicon during nanometric cutting: A molecular dynamics simulation study
作者
关键词
Molecular dynamics, Dislocation nucleation, Amorphization, Nanometric cutting, Single crystalline silicon
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 51, Issue -, Pages 60-70
出版商
Elsevier BV
发表日期
2016-05-19
DOI
10.1016/j.mssp.2016.05.003

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