Molecular dynamics study on nanometric cutting of ion implanted silicon

标题
Molecular dynamics study on nanometric cutting of ion implanted silicon
作者
关键词
Nanometric cutting, Material deformation, Ion implantation, Molecular dynamics
出版物
COMPUTATIONAL MATERIALS SCIENCE
Volume 117, Issue -, Pages 240-250
出版商
Elsevier BV
发表日期
2016-02-21
DOI
10.1016/j.commatsci.2016.01.040

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