Experimental study on size effect of tool edge and subsurface damage of single crystal silicon in nano-cutting
出版年份 2018 全文链接
标题
Experimental study on size effect of tool edge and subsurface damage of single crystal silicon in nano-cutting
作者
关键词
Nano-cutting, Size effect, Subsurface damage, Online observation, Tool edge radius
出版物
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume -, Issue -, Pages -
出版商
Springer Nature
发表日期
2018-06-17
DOI
10.1007/s00170-018-2310-5
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Effects of recovery and side flow on surface generation in nano-cutting of single crystal silicon
- (2018) Feifei Xu et al. COMPUTATIONAL MATERIALS SCIENCE
- Study on ductile mode machining of single-crystal silicon by mechanical machining
- (2017) Dae-Hee Choi et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Effect of multi-pass friction stir processing on the microstructure, mechanical and wear properties of AA5083/ZrO 2 nanocomposites
- (2017) Seyed Sajad Mirjavadi et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Influence of TiO 2 nanoparticles incorporation to friction stir welded 5083 aluminum alloy on the microstructure, mechanical properties and wear resistance
- (2017) Seyed Sajad Mirjavadi et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Heterogeneities in Polymer Structural and Dynamic Properties in Graphene and Graphene Oxide Nanocomposites: Molecular Dynamics Simulations
- (2017) Majid Azimi et al. MACROMOLECULAR THEORY AND SIMULATIONS
- Anisotropy of Single-Crystal Silicon in Nanometric Cutting
- (2017) Zhiguo Wang et al. Nanoscale Research Letters
- Anisotropy of Single-Crystal Silicon in Nanometric Cutting
- (2017) Zhiguo Wang et al. Nanoscale Research Letters
- The effect of tool geometry on subsurface damage and material removal in nanometric cutting single-crystal silicon by a molecular dynamics simulation
- (2016) Houfu Dai et al. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
- Influence of fixed abrasive configuration on the polishing process of silicon wafers
- (2016) Congfu Fang et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Size effect in material removal by cutting at nano scale
- (2015) Fengzhou Fang et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Nanometric cutting in a scanning electron microscope
- (2015) Fengzhou Fang et al. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
- A Study on Material Removal Caused by Phase Transformation of Monocrystalline Silicon During Nanocutting Process via Molecular Dynamics Simulation
- (2013) Peng Zhang et al. Journal of Computational and Theoretical Nanoscience
- Large-Area Gold/Parylene Plasmonic Nanostructures Fabricated by Direct Nanocutting
- (2013) Vaida Auzelyte et al. Advanced Optical Materials
- Research on the effects of machining-induced subsurface damages on mono-crystalline silicon via molecular dynamics simulation
- (2012) Hongwei Zhao et al. APPLIED SURFACE SCIENCE
- Crystallographic effect on subsurface damage formation in silicon microcutting
- (2012) Jiwang Yan et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- A new two-dimensional ultrasonic assisted grinding (2D-UAG) method and its fundamental performance in monocrystal silicon machining
- (2010) Zhiqiang Liang et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Fabrication of micro DOE using micro tools shaped with focused ion beam
- (2010) Z. W. Xu et al. OPTICS EXPRESS
- Subsurface crystal lattice deformation machined by ultraprecision grinding of soft-brittle CdZnTe crystals
- (2009) Zhenyu Zhang et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- High-resolution observations of an amorphous layer and subsurface damage formed by femtosecond laser irradiation of silicon
- (2008) T. H. R. Crawford et al. JOURNAL OF APPLIED PHYSICS
- Nanoscale experimental study of a micro-crack in silicon
- (2008) C.W. Zhao et al. PHYSICA B-CONDENSED MATTER
- Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
- (2008) Jiwang Yan et al. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
- Experimental investigation of surface/subsurface damage formation and material removal mechanisms in SiC grinding
- (2007) Sanjay Agarwal et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
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