Fabrication of micro DOE using micro tools shaped with focused ion beam

标题
Fabrication of micro DOE using micro tools shaped with focused ion beam
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 18, Issue 8, Pages 8025
出版商
The Optical Society
发表日期
2010-04-01
DOI
10.1364/oe.18.008025

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