High-resolution observations of an amorphous layer and subsurface damage formed by femtosecond laser irradiation of silicon

标题
High-resolution observations of an amorphous layer and subsurface damage formed by femtosecond laser irradiation of silicon
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 5, Pages 053104
出版商
AIP Publishing
发表日期
2008-03-07
DOI
10.1063/1.2885111

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