Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering

标题
Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 524, Issue -, Pages 328-333
出版商
Elsevier BV
发表日期
2012-10-16
DOI
10.1016/j.tsf.2012.10.015

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