Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate

出版年份 2010 全文链接

标题

作者

关键词

出版物

Volume 256, Issue 12, Pages 3856-3861

出版商

Elsevier BV

发表日期

2010-01-25

DOI

10.1016/j.apsusc.2010.01.040

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