Investigation on the surface characterization of Ga-faced GaN after chemical-mechanical polishing

标题
Investigation on the surface characterization of Ga-faced GaN after chemical-mechanical polishing
作者
关键词
Chemical mechanical polishing, Gallium nitride, SiO, 2, abrasive, Catalyst, Atomic step structure
出版物
APPLIED SURFACE SCIENCE
Volume 338, Issue -, Pages 85-91
出版商
Elsevier BV
发表日期
2015-02-21
DOI
10.1016/j.apsusc.2015.02.107

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