Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates

出版年份 2016 全文链接

标题

作者

关键词

Composite materials, Chemical synthesis, Surfaces, X-ray photo-emission spectroscopy (XPS)

出版物

Volume 172, Issue -, Pages 26-31

出版商

Elsevier BV

发表日期

2016-01-06

DOI

10.1016/j.matchemphys.2015.12.026

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