Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces

标题
Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces
作者
关键词
-
出版物
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 58, Issue 1, Pages 485-490
出版商
Elsevier BV
发表日期
2009-04-23
DOI
10.1016/j.cirp.2009.03.115

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