Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O
Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O
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