MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
出版年份 2022 全文链接
标题
MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 29, Issue 1, Pages 1-17
出版商
Springer Science and Business Media LLC
发表日期
2022-11-05
DOI
10.1007/s00542-022-05391-9
参考文献
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