Eliminate the transmission feedthrough of thermal-piezoresistive I2-BAR MEMS resonators based on reverse-biased PN junction

标题
Eliminate the transmission feedthrough of thermal-piezoresistive I2-BAR MEMS resonators based on reverse-biased PN junction
作者
关键词
-
出版物
Micro & Nano Letters
Volume -, Issue -, Pages -
出版商
Institution of Engineering and Technology (IET)
发表日期
2018-05-24
DOI
10.1049/mnl.2017.0774

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