Analytical Modeling of a Novel High- $Q$ Disk Resonator for Liquid-Phase Applications

标题
Analytical Modeling of a Novel High- $Q$ Disk Resonator for Liquid-Phase Applications
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 1, Pages 38-49
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2015-01-20
DOI
10.1109/jmems.2014.2365719

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