Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: I. Resonator design and modeling

标题
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: I. Resonator design and modeling
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 12, Pages 125018
出版商
IOP Publishing
发表日期
2010-11-19
DOI
10.1088/0960-1317/20/12/125018

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