Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement

标题
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 29, Issue 12, Pages 124006
出版商
IOP Publishing
发表日期
2019-11-06
DOI
10.1088/1361-6439/ab4e29

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