Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors

标题
Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors
作者
关键词
-
出版物
IEEE SENSORS JOURNAL
Volume 12, Issue 6, Pages 1958-1964
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-12-23
DOI
10.1109/jsen.2011.2181360

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