标题
AxBAxB… pulsed atomic layer deposition: Numerical growth model and experiments
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 8, Pages 085306
出版商
AIP Publishing
发表日期
2016-02-26
DOI
10.1063/1.4942439
参考文献
相关参考文献
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