Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth

标题
Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 6, Pages 060603
出版商
American Vacuum Society
发表日期
2015-07-10
DOI
10.1116/1.4926382

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