Interactions between tri-methylaluminum molecules and their effect on the reaction of tri-methylaluminum with an OH-terminated Si (001) surface

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 257, Issue 15, Pages 6326-6331

出版商

Elsevier BV

发表日期

2011-01-19

DOI

10.1016/j.apsusc.2011.01.032

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