High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2 devices by control of oxygen-deficient layer

标题
High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2 devices by control of oxygen-deficient layer
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 33, Issue 8, Pages 085206
出版商
IOP Publishing
发表日期
2021-11-17
DOI
10.1088/1361-6528/ac3a38

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