Effect of dead layers on the ferroelectric property of ultrathin HfZrOx film

标题
Effect of dead layers on the ferroelectric property of ultrathin HfZrOx film
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 117, Issue 25, Pages 252906
出版商
AIP Publishing
发表日期
2020-12-24
DOI
10.1063/5.0030856

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