标题
High Si multilayered TiSiN/TiN(Ag) films with superior oxidation resistance
作者
关键词
TiSiN/TiN(Ag) films, Structure, Thermal stability, Oxidation resistance
出版物
Journal of Materials Research and Technology-JMR&T
Volume 12, Issue -, Pages 2340-2347
出版商
Elsevier BV
发表日期
2021-04-22
DOI
10.1016/j.jmrt.2021.04.040
参考文献
相关参考文献
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