High temperature tribological behaviour of TiSiN(Ag) films deposited by HiPIMS in DOMS mode

标题
High temperature tribological behaviour of TiSiN(Ag) films deposited by HiPIMS in DOMS mode
作者
关键词
TiSiN(Ag), HiPIMS, Tribology, High temperature
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 399, Issue -, Pages 126176
出版商
Elsevier BV
发表日期
2020-07-08
DOI
10.1016/j.surfcoat.2020.126176

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