Low peak power deposition regime in HiPIMS: Deposition of hard and dense nanocomposite Ti-Si-N films by DOMS without the need of energetic bombardment

标题
Low peak power deposition regime in HiPIMS: Deposition of hard and dense nanocomposite Ti-Si-N films by DOMS without the need of energetic bombardment
作者
关键词
TiSiN nanocomposite films, HiPIMS, DOMS, TEM, Structure
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 397, Issue -, Pages 125996
出版商
Elsevier BV
发表日期
2020-06-03
DOI
10.1016/j.surfcoat.2020.125996

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