Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings

标题
Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings
作者
关键词
CrAlSiN, x, CrAlSiO, y, N, x, Optical properties, Hardness, Chemical structure
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 328, Issue -, Pages 134-141
出版商
Elsevier BV
发表日期
2017-08-16
DOI
10.1016/j.surfcoat.2017.08.038

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