Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering

标题
Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering
作者
关键词
TiSiN(Ag), High power impulse magnetron sputtering, Oxidation resistance, Nanocomposite
出版物
THIN SOLID FILMS
Volume -, Issue -, Pages 137423
出版商
Elsevier BV
发表日期
2019-07-12
DOI
10.1016/j.tsf.2019.137423

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