Microstructure–property relations of reactively magnetron sputtered VCxNy films

标题
Microstructure–property relations of reactively magnetron sputtered VCxNy films
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 13-14, Pages 3805-3809
出版商
Elsevier BV
发表日期
2011-01-23
DOI
10.1016/j.surfcoat.2011.01.037

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