In-situ low-temperature synthesis of PS-ZrO2 hybrid films and their characterization for high-k gate dielectric application
出版年份 2021 全文链接
标题
In-situ low-temperature synthesis of PS-ZrO2 hybrid films and their characterization for high-k gate dielectric application
作者
关键词
Hybrid films, High-k dielectrics, PS-ZrO, 2, Sol-gel, MIM capacitor device
出版物
PROGRESS IN ORGANIC COATINGS
Volume 154, Issue -, Pages 106188
出版商
Elsevier BV
发表日期
2021-02-23
DOI
10.1016/j.porgcoat.2021.106188
参考文献
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