Interface control and modification of band alignment and electrical properties of HfTiO/GaAs gate stacks by nitrogen incorporation
出版年份 2014 全文链接
标题
Interface control and modification of band alignment and electrical properties of HfTiO/GaAs gate stacks by nitrogen incorporation
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 2, Issue 27, Pages 5299-5308
出版商
Royal Society of Chemistry (RSC)
发表日期
2014-04-17
DOI
10.1039/c4tc00572d
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Atomistic Origins of High Rate Capability and Capacity of N-Doped Graphene for Lithium Storage
- (2014) Xi Wang et al. NANO LETTERS
- Effects of O3 and H2O as oxygen sources on the atomic layer deposition of HfO2 gate dielectrics at different deposition temperatures
- (2014) Sang Young Lee et al. Journal of Materials Chemistry C
- Structural Evolution and the Control of Defects in Atomic Layer Deposited HfO2–Al2O3 Stacked Films on GaAs
- (2013) Yu-Seon Kang et al. ACS Applied Materials & Interfaces
- Optical Constants of Amorphous, Transparent Titanium-Doped Tungsten Oxide Thin Films
- (2013) C. V. Ramana et al. ACS Applied Materials & Interfaces
- Surface Passivation and Interface Properties of Bulk GaAs and Epitaxial-GaAs/Ge Using Atomic Layer Deposited TiAlO Alloy Dielectric
- (2013) G. K. Dalapati et al. ACS Applied Materials & Interfaces
- Improved interfacial and electrical properties of GaAs metal-oxide-semiconductor capacitors with HfTiON as gate dielectric and TaON as passivation interlayer
- (2013) L. S. Wang et al. APPLIED PHYSICS LETTERS
- Interface engineering and chemistry of Hf-based high-k dielectrics on III–V substrates
- (2013) Gang He et al. SURFACE SCIENCE REPORTS
- Interface Optimization and Band Alignments of HfTiO/InGaAs Gate Stacks by Metalorganic Chemical Vapor Deposition of AlON Passivation Layer
- (2013) Gang He et al. Science of Advanced Materials
- Effect of dimethylaluminumhydride-derived aluminum oxynitride passivation layer on the interface chemistry and band alignment of HfTiO-InGaAs gate stacks
- (2013) Gang He et al. APL Materials
- N-Doped Graphene-SnO2 Sandwich Paper for High-Performance Lithium-Ion Batteries
- (2012) Xi Wang et al. ADVANCED FUNCTIONAL MATERIALS
- Reduction in interface state density of Al2O3/InGaAs metal-oxide-semiconductor interfaces by InGaAs surface nitridation
- (2012) Takuya Hoshii et al. JOURNAL OF APPLIED PHYSICS
- Interfacial, optical properties and band offsets of HfTiON thin films with different nitrogen concentrations
- (2011) M. Liu et al. JOURNAL OF APPLIED PHYSICS
- Atomic layer deposited HfO2 and HfO2/TiO2 bi-layer films using a heteroleptic Hf-precursor for logic and memory applications
- (2011) Minha Seo et al. JOURNAL OF MATERIALS CHEMISTRY
- Composition dependence of interface control and optimization on the performance of an HfTiON gate dielectric metal-oxide-semiconductor capacitor
- (2011) G He et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- HfO2–GaAs metal-oxide-semiconductor capacitor using dimethylaluminumhydride-derived aluminum oxynitride interfacial passivation layer
- (2010) G. He et al. APPLIED PHYSICS LETTERS
- Improved Interfacial Properties of Ge MOS Capacitor With High-k Dielectric by Using TaON/GeON Dual Interlayer
- (2010) F. Ji et al. IEEE ELECTRON DEVICE LETTERS
- Composition dependence of band alignment and dielectric constant for Hf1−xTixO2 thin films on Si (100)
- (2010) Cong Ye et al. JOURNAL OF APPLIED PHYSICS
- Comparison of methods to quantify interface trap densities at dielectric/III-V semiconductor interfaces
- (2010) Roman Engel-Herbert et al. JOURNAL OF APPLIED PHYSICS
- Investigation on GaAs surface treated with dimethylaluminumhydride
- (2009) Hong-Liang Lu et al. APPLIED PHYSICS LETTERS
- Model of interface states at III-V oxide interfaces
- (2009) John Robertson APPLIED PHYSICS LETTERS
- Thermal nitridation passivation dependent band offset and electrical properties of AlOxNy/GaAs gate stacks
- (2009) G. He et al. APPLIED PHYSICS LETTERS
- Detection of Ga suboxides and their impact on III-V passivation and Fermi-level pinning
- (2009) C. L. Hinkle et al. APPLIED PHYSICS LETTERS
- In[sub 0.53]Ga[sub 0.47]As n-metal-oxide-semiconductor field effect transistors with atomic layer deposited Al[sub 2]O[sub 3], HfO[sub 2], and LaAlO[sub 3] gate dielectrics
- (2009) Han Zhao et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Electrical study of sulfur passivated In0.53Ga0.47As MOS capacitor and transistor with ALD Al2O3 as gate insulator
- (2009) Han-Chung Lin et al. MICROELECTRONIC ENGINEERING
- Chemical and physical interface studies of the atomic-layer-deposited Al2O3 on GaAs substrates
- (2008) D. Shahrjerdi et al. APPLIED PHYSICS LETTERS
- The effect of nitrogen concentration on the band gap and band offsets of HfOxNy gate dielectrics
- (2008) X. J. Wang et al. APPLIED PHYSICS LETTERS
- Capacitance-voltage characterization of GaAs–Al2O3 interfaces
- (2008) G. Brammertz et al. APPLIED PHYSICS LETTERS
- Composition dependence of electronic structure and optical properties of Hf1−xSixOy gate dielectrics
- (2008) G. He et al. JOURNAL OF APPLIED PHYSICS
- Structure, composition and evolution of dispersive optical constants of sputtered TiO2 thin films: effects of nitrogen doping
- (2008) G He et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started