Structural and Electrical Characterization of SiO2 Gate Dielectrics Deposited from Solutions at Moderate Temperatures in Air

标题
Structural and Electrical Characterization of SiO2 Gate Dielectrics Deposited from Solutions at Moderate Temperatures in Air
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 9, Issue 1, Pages 529-536
出版商
American Chemical Society (ACS)
发表日期
2016-12-09
DOI
10.1021/acsami.6b11214

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