标题
Pt thin-film resistance temperature detector on flexible Hastelloy tapes
作者
关键词
Thin films, Sensors, Thermal stability, Annealing, Insulation layer
出版物
VACUUM
Volume 184, Issue -, Pages 109966
出版商
Elsevier BV
发表日期
2020-11-29
DOI
10.1016/j.vacuum.2020.109966
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Effect of high temperature annealing on resistivity and temperature coefficient of resistance of sputtered platinum thin films of SiO2/Pt/SiOx interfaces
- (2020) Timo Schössler et al. THIN SOLID FILMS
- Fabrication and characterization of nickel thin film as resistance temperature detector
- (2020) Jinting Cui et al. VACUUM
- The impact of thermal annealing on the temperature dependent resistance behavior of Pt thin films sputtered on Si and Al2O3 substrates
- (2019) Xingkai Lin et al. THIN SOLID FILMS
- Highly ductile amorphous oxide at room temperature and high strain rate
- (2019) Erkka J. Frankberg et al. SCIENCE
- Long-term stability and disappearing anode effects during reactive DC and pulsed bipolar magnetron sputtering of Al2O3
- (2019) Pavel Mareš et al. VACUUM
- Superflexibility of ITO Electrodes via Submicron Patterning
- (2018) Qian Dong et al. ACS Applied Materials & Interfaces
- Thermal stability of Pt-Ti bilayer films annealing in vacuum and ambient atmosphere
- (2018) Sizhe Weng et al. APPLIED SURFACE SCIENCE
- Alumina composite coatings with enhanced high-temperature electrical insulating properties on Ni-based superalloy substrates
- (2018) Xiaohui Zhao et al. CERAMICS INTERNATIONAL
- Fabrication and characterization of NiCoCrAlY coating deposited on nickel-based superalloy substrates
- (2018) Xiaowei Hou et al. VACUUM
- Microstructural and electrical properties of heat treated resistive Ti/Pt thin layers
- (2017) D. Resnik et al. THIN SOLID FILMS
- Preparation and thermoelectric characteristics of ITO/Pt thin film thermocouples on Ni-based superalloy substrate
- (2017) Xiaohui Zhao et al. VACUUM
- The influence of deposition parameters on Ti/Pt film growth by confocal sputtering and the temperature dependent resistance behavior using SiOx and Al2O3 substrates
- (2014) G. Schmidl et al. APPLIED SURFACE SCIENCE
- MEMS-based Pt film temperature sensor on an alumina substrate
- (2014) Jie Han et al. MATERIALS LETTERS
- Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines
- (2013) Ian Tougas et al. SENSORS
- Thermal stability of Pt/Cr and Pt/Cr2O3 thin-film layers on a SiNx/Si substrate for thermal sensor applications
- (2013) Alexandra Garraud et al. THIN SOLID FILMS
- Effect of physical vapor deposited Al2O3 film on TGO growth in YSZ/CoNiCrAlY coatings
- (2012) Yanjun Li et al. CERAMICS INTERNATIONAL
- Development of a platinum resistance thermometer on the silicon substrate for phase change studies
- (2012) Qingjun Cai et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Thermal Hysteresis in Thin-Film Platinum Resistance Thermometers
- (2011) K. S. Gam et al. INTERNATIONAL JOURNAL OF THERMOPHYSICS
- Stability of thin platinum films implemented in high-temperature microdevices
- (2009) R.M. Tiggelaar et al. SENSORS AND ACTUATORS A-PHYSICAL
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