Thermal stability of Pt/Cr and Pt/Cr2O3 thin-film layers on a SiNx/Si substrate for thermal sensor applications

标题
Thermal stability of Pt/Cr and Pt/Cr2O3 thin-film layers on a SiNx/Si substrate for thermal sensor applications
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 540, Issue -, Pages 256-260
出版商
Elsevier BV
发表日期
2013-06-19
DOI
10.1016/j.tsf.2013.06.012

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