Microstructural and electrical properties of heat treated resistive Ti/Pt thin layers

出版年份 2017 全文链接

标题

作者

关键词

Ti/Pt thin film, Annealing, Microstructure, Resistivity, Temperature coefficient of resistance (TCR), AES, XPS

出版物

Volume 639, Issue -, Pages 64-72

出版商

Elsevier BV

发表日期

2017-08-18

DOI

10.1016/j.tsf.2017.08.028

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