Pt thin-film resistance temperature detector on flexible Hastelloy tapes
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Title
Pt thin-film resistance temperature detector on flexible Hastelloy tapes
Authors
Keywords
Thin films, Sensors, Thermal stability, Annealing, Insulation layer
Journal
VACUUM
Volume 184, Issue -, Pages 109966
Publisher
Elsevier BV
Online
2020-11-29
DOI
10.1016/j.vacuum.2020.109966
References
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