MEMS-based Pt film temperature sensor on an alumina substrate

标题
MEMS-based Pt film temperature sensor on an alumina substrate
作者
关键词
-
出版物
MATERIALS LETTERS
Volume 125, Issue -, Pages 224-226
出版商
Elsevier BV
发表日期
2014-04-03
DOI
10.1016/j.matlet.2014.03.170

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