Long-term stability and disappearing anode effects during reactive DC and pulsed bipolar magnetron sputtering of Al2O3

标题
Long-term stability and disappearing anode effects during reactive DC and pulsed bipolar magnetron sputtering of Al2O3
作者
关键词
-
出版物
VACUUM
Volume 173, Issue -, Pages 109161
出版商
Elsevier BV
发表日期
2019-12-25
DOI
10.1016/j.vacuum.2019.109161

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