TiN/Gd:HfO2/TiN capacitors grown by PEALD showing high endurance ferroelectric switching
出版年份 2020 全文链接
标题
TiN/Gd:HfO2/TiN capacitors grown by PEALD showing high endurance ferroelectric switching
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 117, Issue 25, Pages 252903
出版商
AIP Publishing
发表日期
2020-12-21
DOI
10.1063/5.0035706
参考文献
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