Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition

标题
Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition
作者
关键词
-
出版物
Micromachines
Volume 11, Issue 5, Pages 527
出版商
MDPI AG
发表日期
2020-05-22
DOI
10.3390/mi11050527

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