High Purity Tungsten Nanostructures via Focused Electron Beam Induced Deposition with Carrier Gas Assisted Supersonic Jet Delivery of Organometallic Precursors

标题
High Purity Tungsten Nanostructures via Focused Electron Beam Induced Deposition with Carrier Gas Assisted Supersonic Jet Delivery of Organometallic Precursors
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 120, Issue 19, Pages 10584-10590
出版商
American Chemical Society (ACS)
发表日期
2016-04-30
DOI
10.1021/acs.jpcc.5b11488

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