Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

出版年份 2018 全文链接

标题

作者

关键词

出版物

Volume 9, Issue -, Pages 2581-2598

出版商

Beilstein Institut

发表日期

2018-09-27

DOI

10.3762/bjnano.9.240

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